Reference: www.secsgem.cn
www.semisecs.com
1 Introduction
. Support SEMI E4 (SECS I), E5 (SECS II), E30 (GEM), E37 (HSMS) communication standards.
. Extended support for SEMI E39, E40, E87, E90, E94, E116, E142
. Support multiple development languages C, C++, C#, Labview, QT.
. Optional PLC and MES software bridge module, no need to develop.
. Using DLL module method, freely add to the equipment software.
. Provide host EAP simulation software, easily and automatically control equipment.
. Support x86, x64 version
1.1 Product overview
We adopt an excellent software framework, flexibly support SECS/GEM, SECS/GEM300, and support high-speed mass message interaction.
1.1.1 High scalability
It can be easily extended to support GEM 300, Wafer Map, Strip Map and other functions, just add GEM300 function directly to the existing SECS/GEM.
SECS/GEM and SECS/GEM300 support agreement
1.2 Communication realization
For traditional implementation, SECS/GEM announces the interface to the factory, as shown in the figure below.
1.2.2 Multi-host implementation
DMS SECS/GEM will provide multi-server or multi-connection functions. One device can publish two or more GEM interfaces, or connect to multiple hosts. This is easy to implement, just instantiate multiple objects.
1.3 Current SEMI standards
DMS SECS/GEM emphasizes the need to follow the current SEMI standards.
The following list is a list of functions we have supported.
GEM COMPLIANCE STATEMENT
FUNDAMENTAL GEM REQUIREMENTS IMPLEMENTED GEM-COMPLIANT
1.5 Software flexibility
JNG SECS/GEM supports a large number of extended interfaces, allowing customers to customize the processing of SECS-II messages.
E.g
Process S2F65 and S2F66 messages in non-standard.
Send some customers’ non-standard S6F3 messages.
1.6 Performance Index
1.7 No need to learn SECS
- Users do not need to learn SECS/GEM, we guide and explain the knowledge required by users. Let users easily do not need to care about SECS/GEM related content.
- We design the SECS interactive processing flow of the equipment together with the user.
- Most of the SECS/GEM standards are implemented in DMS SECS/GEM, and software applications can complete SECS/GEM communication with minimal coding.
1.8 Custom messaging
DMS SECS/GEM fully supports the construction, sending, receiving and parsing of any SECS-II messages, but users hardly need to process SECS-II messages.
1.9 Record collection
Easily collect low-level debugging information, such as DMS SECS/GEM HSMS, SECS-II protocol message sending and receiving messages, and status changes.
1.10 SECS Manual document
. We provide a SECS Manual document.
The data includes various indicators of equipment SECS/GEM, the use of standard protocols, and the implementation.
. Users can test and use the equipment by themselves according to the SECS Manual.
1.11 Product List
SECS/GEM SDK for secondary development
Sample program code (examples of using various functions)
Development Process Manual
2 Product structure
2.1 Control Panel
The EquipView.exe device-side connection test tool is a graphical user interface (GUI) that allows users to develop or call tools to display content on the basis of it. Running diagram Figure 3
image 3
2.2 Use environment
① Windows XP
② Windows 7
③ Windows 10
④ Windows Server 2008
⑤ Windows Server 2012
⑥ Windows Server 2016
2.3 Software Development Kit
① Microsoft Visual Studio 2010
② Microsoft Visual Studio 2012
③ Microsoft Visual Studio 2013
④ Microsoft Visual Studio 2015
⑤ Others: VC6, VS2005, VS2019, etc.
2.4 Programming language
① Microsoft Visual C
② Microsoft Visual C++
③ Microsoft Visual C#
④ Ni Labview
2.5 SECS/GEM Manual
The GEM standard requires equipment suppliers to create a GEM manual (document) describing the SECS-II interface and GEM implementation. This template makes it very easy to create a GEM interface manual and shortens the total time required to complete the SECS/GEM interface.
2.6 Operating license
Only one set of operating license is required for each device, and no operating license is required.
2.7 Function configuration
Easily configure various functions and parameters through configuration software.
Product function support
3.1 GEM interface
The GEM standard provides a framework for standard factory automation to monitor and control equipment from a remote host.
DMS SECS/GEM has built-in and integrated various functions into the module, and users only need to enable or use the required functions.
Figure 4
3.2. Collection events
The GEM interface defines the events of the machine. When the status of the device changes, the host will be notified in the form of an event.
Users can call the EventPost interface to notify the MES of equipment alarms.
3.3 Alarm
The GEM interface defines the alarm of the machine. When an alarm is set, it means that a specific hazardous event has occurred on the device. When the alarm is cleared, it means that the operator has confirmed that the situation or problem has been cleared.
The user can call AlarmSet to notify the MES of the equipment alarm.
3.4 Terminal Services
The host and the device can use terminal services to exchange text messages for the device operator.
3.5 Data collection
The GEM interface defines variables. Variables can provide important machine data such as the number of cycles completed, total errors, material ID, clock, execution status information or sensor data.
Figure 5
3.6 Tracking data collection
The host can set the device to automatically report status variables at a specified frequency.
This function has been built-in and integrated internally. When MES informs the device of Trace Data, Golden Pumpkin will take the initiative to report data regularly.
3.7 Incident report
The host can configure the computer to automatically send variable values in reports when specified collection events occur.
This function does not require user care and configuration, and Golden Pumpkin has been built-in and integrated inside.
Allow user customization or dynamic configuration of EAP and MES
3.8 Process program management
Handler management provides a method for transferring handlers (also called recipes) between the host and the device.
Golden Pumpkin provides customers with the easiest way, users do not need to care about how to upload, download, delete and other management programs.
3.8 Device control and configuration
GEM allows the host to use remote commands and device constants to control and configure the machine.
3.8.1 Remote Command
The GEM interface defines a set of remote commands so that the server can remotely control the device.
3.4.2 Device constant
Each GEM interface defines a set of constants required by GEM and a set of unique machine-specific constants. Device constants can configure the behavior of device software and hardware.
- Advanced features
Due to the difficulty in implementing the function, basically no domestic supplier has the ability to implement this function, and we have already implemented it for terminal use.
Upload and download of Wafer Map and Strip Map are important functions in die bonding machines and spot measuring equipment. The spot measurement equipment reports the measurement results through the Map, and the die bonding machine knows the particles to be extracted through the Wafer Map.
Meet the requirements and specifications of standards E39 and E142.